To solve a problem that an analysis of a component constituting an ultrathin layer on a laminate surface with a high degree of accuracy is difficult because in the case of sampling of a micro sample piece of the ultrathin layer of 300 nm or less in thickness by using a sampling needle and a sampling blade, etc., the mixture of a partial substrate layer into the sample is inevitable.
An analysis method of a component constituting an ultrathin layer present as a surface layer of a laminate consisting of the ultrathin layer of 10-300 nm thick and a substrate layer includes a step of scraping-and-sampling the component constituting the ultrathin layer using a powder not subject to a pyrolysis with a temperature of 1000°C or less, and a step of supplying the component sampled by the step of scraping-and-sampling the component to a pyrolytic gas chromatograph mass analyzer.
KUNIMASA SEIYA
FURUTA KATSUHIRO
Toru Sakamoto