ANALYTIC SYSTEM AND ANALYSIS METHOD FOR ELECTRON EMISSION CHARACTERISTIC

Title:

ANALYTIC SYSTEM AND ANALYSIS METHOD FOR ELECTRON EMISSION CHARACTERISTIC

Document Type and Number:

Japanese Patent JP2009238680

Kind Code:

A

Abstract:

To provide a technique capable of accurately separating a formation lag time and a statistical lag time in an analytic system and an analysis method for electron emission characteristics and identifying energetic density of one or a plurality of electron emission sources.

Measurement data of an address discharge lag time td to a suspension time ti and temperature T are input. Discharge probability frequency and existing discharge probability are calculated from the number of accumulation of the measurement data. An electron emission time constant tsexp (ti, T) of a priming electron is calculated. A function for energy state density of an electron discharge source is set up, and an average value, a dispersed value, a searching range of an effective number, and a searching width of activated energy are established. The electron emission time constant tsth (ti, T) of the priming electron is calculated by overlap integral of energy state density of the electron emission source and a window function. An average value, a dispersed value, and an effective number of the activated energy wherein an average mean square error of tsexp (ti, T) and tsth (ti, T) becomes the least are determined.

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Inventors:

KA KIRIN
SUZUKI KEIZO
UEMURA NORIHIRO
NOBUKI SHUNICHIRO
MIYAKE TATSUYA
MORI SHUNSUKE
MIKAMI YOSHIAKI
TSUJI KAZUTAKA
SHIIKI MASATOSHI

Application Number:

JP2008085871A

Publication Date:

October 15, 2009

Filing Date:

March 28, 2008

Export Citation:

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Assignee:

HITACHI LTD

International Classes:

G01R29/24; H01J1/32; G09G3/288; H01J9/42; H01J11/02; H01J11/38; H01J11/40; H01J11/44

Domestic Patent References:

JP2005071858A	2005-03-17
JP2007134151A	2007-05-31
JP2002033053A	2002-01-31
JP2005071858A	2005-03-17
JP2007134151A	2007-05-31
JP2002033053A	2002-01-31

Other References:

JPN6012015270; Ｓ．　Ｈｏ　ｅｔ　ａｌ．: '"Ｎｕｍｅｒｉｃａｌ　Ａｎａｌｙｓｉｓ　ｏｆ　Ｄｅｎｓｉｔｙ　ｏｆ　Ｅｎｅｒｇｙ　Ｓｔａｔｅｓ　ｆｏｒ　Ｅｌｅｃｔｒｏｎ　Ｅｍｉｓｓｉｏｎ　Ｓｏｕｒｃｅｓ　ｉｎ　ＭｇＯ"' Ｐｒｏｃｅｅｄｉｎｇｓ　ｏｆ　ＩＤＷ　'０８ＰＤＰ３-３, 20081205, ｐ．　１８６９-１８７２
JPN6012015272; Ｓ．　Ｈｏ　ｅｔ　ａｌ．: '"Ｄｉｓｃｈａｒｇｅ　Ｐｒｏｂａｂｉｌｉｔｙ　Ｍｏｄｅｌ　ｆｏｒ　Ａｎａｌｙｚｉｎｇ　Ｆｏｒｍａｔｉｖｅ　Ｄｅｌａｙ　Ｔｉｍｅ　ａｎｄ　Ｅｌｅｃｔｒｏｎ　Ｅｍｉｓｓｉｏｎ　Ｐｒｏｐｅｒｔｉｅｓ　ｏｆ' Ｐｒｏｃｅｅｄｉｎｇｓ　ｏｆ　ＩＤＷ　'０７ＰＤＰ２-３, 20071206, ｐ．　８０７-８１０
JPN6012015270; Ｓ．　Ｈｏ　ｅｔ　ａｌ．: '"Ｎｕｍｅｒｉｃａｌ　Ａｎａｌｙｓｉｓ　ｏｆ　Ｄｅｎｓｉｔｙ　ｏｆ　Ｅｎｅｒｇｙ　Ｓｔａｔｅｓ　ｆｏｒ　Ｅｌｅｃｔｒｏｎ　Ｅｍｉｓｓｉｏｎ　Ｓｏｕｒｃｅｓ　ｉｎ　ＭｇＯ"' Ｐｒｏｃｅｅｄｉｎｇｓ　ｏｆ　ＩＤＷ　'０８ＰＤＰ３-３, 20081205, ｐ．　１８６９-１８７２
JPN6012015272; Ｓ．　Ｈｏ　ｅｔ　ａｌ．: '"Ｄｉｓｃｈａｒｇｅ　Ｐｒｏｂａｂｉｌｉｔｙ　Ｍｏｄｅｌ　ｆｏｒ　Ａｎａｌｙｚｉｎｇ　Ｆｏｒｍａｔｉｖｅ　Ｄｅｌａｙ　Ｔｉｍｅ　ａｎｄ　Ｅｌｅｃｔｒｏｎ　Ｅｍｉｓｓｉｏｎ　Ｐｒｏｐｅｒｔｉｅｓ　ｏｆ' Ｐｒｏｃｅｅｄｉｎｇｓ　ｏｆ　ＩＤＷ　'０７ＰＤＰ２-３, 20071206, ｐ．　８０７-８１０

Attorney, Agent or Firm:

Yamato Tsutsui

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