Title:
ANALYTICAL METHOD FOR ULTRATHIN-FILM TWO-LAYER STRUCTURE USING SPECTRAL ELLIPSOMETER
Document Type and Number:
Japanese Patent JP3937149
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a method for measuring and analyzing an ultrathin-film two-layer structure by using a spectral ellipsometer.
SOLUTION: The method comprises a spectrum measuring stage, a first analytical stage, a second analytical stage and a third analytical stage. At the spectrum measuring stage, the ultrathin-film two-layer structure on the surface of a substrate as a measuring object is measured by using the spectral ellipsometer so as to obtain data on the object. In a first step at the first analytical stage, a plurality of models of the object are set up, and the plurality of models are fitted to a measuring spectrum in a second step, and the results of the models are decided in a third step. In a first step at the second analytical stage, a result obtained at the first analytical stage is set as an initial value of a new model, and an extended BLMC operation is performed in the second and third steps. In a first step at the third analytical stage, a result obtained at the second analytical stage is used, a final fitting operation is performed, and a result obtained by the fitting operation is confirmed at the second step. In the third step, the results are saved.
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Inventors:
Nabat Bergabain, Natalia
Yoko Waza
Yoko Waza
Application Number:
JP2002110710A
Publication Date:
June 27, 2007
Filing Date:
April 12, 2002
Export Citation:
Assignee:
HORIBA, Ltd.
International Classes:
G01B11/06; G01N21/21; G01J3/447; G01J4/04; G01N21/41; (IPC1-7): G01N21/21; G01B11/06; G01J3/447; G01J4/04; G01N21/41
Domestic Patent References:
| JP10160576A |
Other References:
J.A.Woollam 外5名,“Overview of Variable Angle Spectroscopic Ellipsometry (VASE), Part I: Basic Theory and Typical Applications”,Proceedings of SPIE,1999年 7月,Vol.CR72,pp.3-28
J.F.Elman 外3名,“Characterization of biaxially-stretched plastic films by generalized ellipsometry”,Thin Solid Films,1998年 2月13日,Vols.313-314,pp.814-818
D. Bhattacharyya 外3名,“Spectroscopic ellipsometry of multilayer dielectric coatings”,Vacuum,2001年 2月 1日,Vol.60, Issue 4,pp.419-424
J.F.Elman 外3名,“Characterization of biaxially-stretched plastic films by generalized ellipsometry”,Thin Solid Films,1998年 2月13日,Vols.313-314,pp.814-818
D. Bhattacharyya 外3名,“Spectroscopic ellipsometry of multilayer dielectric coatings”,Vacuum,2001年 2月 1日,Vol.60, Issue 4,pp.419-424
Attorney, Agent or Firm:
Nobuo Kono
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