ANALYZING METHOD

Japanese Patent JP3506599

B2

PROBLEM TO BE SOLVED: To obtain an analyzing method in which an organic substance in the atmosphere of a cleam room can be analyzed more precisely by adsorbing a substance in the air in the atmosphere to be analyzed by a collector composed of polysilicon small pieces and thermally describing the substance, which is adsorbed by the small pieces.
SOLUTION: The air in the atmosphere of a clean room is passed through the inside of an adsorption tube 101, and an organic substance in the air is adsorbed by a collector 101a composed of polysilicon parilicon particles. The adsorption tube 101 is arranged on a heating part 111 in an analyzer 110, a carrier-gas supply part 112 is attached to an end part of he adsorption tube 101, and a carrier gas such as helium or the like is supplied. Then, the collector 101a is heated by the heating part 111, and the organic substance which is adsorbed by the polysilicon particles is desorbed thermally. The organic substance, to be analyzed, which is desorbed thermally is introduced into a cryofocus part 113 by the carrier gas, and it is cooled by refrigerant such a liquid nitrogen or the like so as to be concentrated. Then, the concentrated organic substance to be analyzed is separated into respective components by a column 114 into which a prescribed filler is filled, and the components are analyzed respectively by a detector 115.

WO/2016/162123	REDUCING EXPANSION FORCES CREATED BY AMMONIA STORAGE MATERIALS
JP2013027800	OXYGEN DETECTING AGENT-EQUIPPED DEOXIDIZER

Yoshimi Shiramizu

JP2314698A

March 15, 2004

February 04, 1998

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NEC Electronics Corporation

B01J20/02; G01N1/22; G01N30/00; G01N30/04; G01N30/72; G01N1/34; (IPC1-7): G01N30/00; G01N1/22; G01N30/04; G01N30/72

JP7174746A
JP60243538A

Masahiko Desk (2 outside)

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