Title:
ANGULAR VELOCITY DETECTOR
Document Type and Number:
Japanese Patent JP3702412
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To raise the sensitivity and accuracy of angular velocity detection and detect the resonance frequency in the angular velocity detection direction of a vibration plate.
SOLUTION: A microgyro 20 for detecting the z-vibration of a vibration plate 5 when it is excited in x-direction and angular velocity is added by using capacity of electrodes 9a and 9b, and the vibration plate 5 are freely vibrated by adding a single high voltage pulse to an electrode 9c. The oscillation of the capacitance of the electrodes 9a and 9b due to this vibration is converted to voltage oscillation, and by detecting the resonance of this oscillation, the frequency of the free vibration, that is, the resonance frequency of the vibration plate in z-direction is detected. The electrode 9c for driving the vibration plate 5 in zdirection is provided besides the electrodes 9a and 9b for capacitance detection. In other way, an electrode for driving in zdirection is shared with the electrode for capacitance detection. Another way is that x-direction excitation is made by a magnet and conduction cable, z-driving is performed with the magnet and a conduction coil, and z-vibration is detected with a strain sensor.
Inventors:
Language
Naruse Yoshihiro
Takahiro Yamada
Naruse Yoshihiro
Takahiro Yamada
Application Number:
JP24982296A
Publication Date:
October 05, 2005
Filing Date:
September 20, 1996
Export Citation:
Assignee:
Aisin Seiki Co., Ltd.
International Classes:
G01C19/56; G01C19/5719; G01C19/5726; G01C19/5755; (IPC1-7): G01C19/56; G01P9/04
Domestic Patent References:
| JP8054238A | ||||
| JP7128067A | ||||
| JP7301535A | ||||
| JP7043166A | ||||
| JP8146029A | ||||
| JP7012573A | ||||
| JP7120266A |