Title:
角速度センサ及びセンサ素子
Document Type and Number:
Japanese Patent JP6509555
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide an angular velocity sensor which has resistance to impact.SOLUTION: An angular velocity sensor comprises: a piezoelectric body; an excitation circuit for applying voltage to drive arms 11A, 11B, 11C, 11D of the piezoelectric body for exciting the drive arms 11A, 11B, 11C, 11D; and a detection circuit for detecting an electric signal generated by oscillation of detection arms 13A, 13B of the piezoelectric body. The piezoelectric body comprises detection side frame arms 14A, 14B, 14C, 14D adjacent to the detection arms 13A, 13B, extending in parallel to the detection arms 13A, 13B, and whose tip ends are free ends, respectively. The excitation circuit excites only the drive arms 11A, 11B, 11C, 11D out of the drive arms 11A, 11B, 11C, 11D and the detection side frame arms 14A, 14B, 14C, 14D. The detection circuit detects the electric signal on only the detection arms 13A, 13B out of the detection arms 13A, 13B and the detection side frame arms 14A, 14B, 14C, 14D.SELECTED DRAWING: Figure 1
Inventors:
Takashi Ano
Application Number:
JP2014259052A
Publication Date:
May 08, 2019
Filing Date:
December 22, 2014
Export Citation:
Assignee:
Kyocera Corporation
International Classes:
G01C19/5607; H01L41/113
Domestic Patent References:
| JP2013205330A | ||||
| JP2001255152A | ||||
| JP2004135052A | ||||
| JP2013186029A |
Attorney, Agent or Firm:
Yasuhiro Iijima