To provide a small-sized angular velocity sensor using a tuning fork oscillator.
The angular velocity sensor includes the tuning fork oscillator 10 for sensing an angular speed, and a package 30 for mounting the tuning fork oscillator 10, and arranges the tuning fork oscillator 10 on an orthogonal line of the package 30. The angular sensor includes a substrate 50 for holding the package 30, and attaches the package 30 to the substrate 50 so that the tuning fork oscillator 10 is inclined at a prescribed angle to a vertical direction. A lead frame 20 for fixing the tuning fork oscillator 10 on the package 30 is provided, has a cross sectional U-shaped curved part, and a space is formed between the package 30 and the lead frame 20 by a curved part.
HOSOKAWA TOSHINOBU
TANAKA HIROSHI
YANAI MASAKI
MIYASHITA TSUTOMU
ISHIKAWA HIROSHI
FUJITSU LTD