To provide a triaxial angular velocity sensor having a small mounting volume.
This angular velocity sensor is equipped with a first tuning-fork type vibrator 10a, having a first base part and a plurality of first arm parts extending from the first base part in a first direction; a second tuning-fork type vibrator 10b, having a second base part and a plurality of second arm parts extending from the second base part in a second direction; and a double-gimbal portion that has a drive gimbal portion vibrating with an axis as a fulcrum that extends in a fourth direction; and a sense gimbal portion vibrating with an axis as a fulcrum that extends in a fifth direction and detects the angular velocity about an axis that extends in a third direction.
ISHIKAWA HIROSHI
TAKAHASHI YUJI
KATSUKI TAKASHI
NAKAZAWA FUMIHIKO
INOUE HIROAKI
FUJITSU LTD
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