Title:
ANGULAR VELOCITY SENSOR
Document Type and Number:
Japanese Patent JP2014190718
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide an angular velocity sensor that allows an addition of a simple structure to attain suppression of an unnecessary oscillation from an angular velocity sensor element, or suppression of a transmission of an unnecessary oscillation from an outside to the angular velocity sensor element.SOLUTION: The angular velocity sensor element comprises: a piezoelectric oscillation type angular velocity sensor element 3; a package 2 that anchors the angular velocity sensor element 3; and a lid part 4 that encapsulates the package 2. The lid part 4 is formed into an anti-oscillation structure part 6 of a two-layer structure of a lid part 5 and at least a set of a low rigidity part 7 and a high rigidity part 8, and thereby an oscillation from an outside becomes harder to be transmitted to the angular velocity sensor element 3, and an unnecessary oscillation can be suppressed. Further, an unnecessary oscillation to be generated from the angular velocity sensor element 3 can be suppressed from leaking to the outside through other components.
Inventors:
UNNO TAKESHI
WADA TAKESHI
WADA TAKESHI
Application Number:
JP2013063765A
Publication Date:
October 06, 2014
Filing Date:
March 26, 2013
Export Citation:
Assignee:
TDK CORP
International Classes:
G01C19/5628; G01C19/5783; H01L23/00; H01L41/113; H01L41/23; H01L41/25
Domestic Patent References:
| JP2000227335A | 2000-08-15 | |||
| JP2005105805A | 2005-04-21 | |||
| JP2003336687A | 2003-11-28 |