Title:
ANGULAR VELOCITY SENSOR
Document Type and Number:
Japanese Patent JPH04372814
Kind Code:
A
Abstract:
PURPOSE:To make the change in sensitivity in a detecting part small and to enhance detecting accuracy by specifying the value of a mechanical quality coefficient in the direction of the thickness of the detecting part of an angular velocity sensor so that the ratio between the natural frequency of the detecting part in the direction of the thickness and the natural frequency of a driving part in the direction of the thickness satisfies the specified relationship. CONSTITUTION:In an angular velocity sensor, a driving part is vibrated and driven by the application of an AC driving voltage. The bending state of a detecting part in the direction which is orthogonal to the vibrating direction is electrically detected, and the angular velocity is detected. At this time, a mechanical quality coefficient QS of the detecting part in the direction of the thickness is 50 or more and 500 or less. The ratio fS/fD between a natural frequency of a detecting part fS in the direction of the thickness and a natural frequency of a driving part f is set so as to satisfy the expression of 1.2-0.0002XQS<=fA/ fD<=1.52-0.0005XQS. Thus, the natural frequency fD is set in a flat region wherein the resonance characteristic of the detecting part in the direction of the thickness is flat, i.e., the region wherein the change in sensitivity of the detecting part is small. Therefore, even if the driving frequency of the angular velocity sensor is changed, the change in sensitivity of the detecting part can be made small. Thus, the angular velocity sensor having the high detecting accuracy can be obtained, and the dispersion among the sensors can be decreased.
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Inventors:
YOSHIDA MASANORI
TABATA MUNEHIRO
KIMURA RYO
TAKENAKA HIROSHI
TABATA MUNEHIRO
KIMURA RYO
TAKENAKA HIROSHI
Application Number:
JP15000491A
Publication Date:
December 25, 1992
Filing Date:
June 21, 1991
Export Citation:
Assignee:
MATSUSHITA ELECTRIC IND CO LTD
International Classes:
G01C19/56; G01C19/5607; (IPC1-7): G01C19/56
Attorney, Agent or Firm:
Akira Kobiji (2 outside)