Title:
角速度センサ
Document Type and Number:
Japanese Patent JPWO2011030541
Kind Code:
A
Inventors:
Takeshi Sasaki
Application Number:
JP2010005498W
Publication Date:
February 04, 2013
Filing Date:
September 08, 2010
Export Citation:
Assignee:
Panasonic incorporated company
International Classes:
H01L41/08; H01L41/187; H01L41/18; G01C19/5776; H01L41/09
Attorney, Agent or Firm:
Hiroki Naito
Daisuke Nagano
Fujii Kentaro
Daisuke Nagano
Fujii Kentaro
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