Title:
アニーリングに関する改良
Document Type and Number:
Japanese Patent JP4909462
Kind Code:
B2
Abstract:
A method and apparatus for annealing an integrated ferroelectric device ( 10 ) is disclosed in which the device ( 10 ) comprises a first layer of material capable of existing in a ferroelectric state and a second layer of material defining an integrated circuit below the first layer such as a microbridge thermal detector. The method comprises producing a pulse of energy, extending the pulse temporally using a pulse extender ( 200 ) and illuminating the first layer with the extended pulse. The duration and wavelength and fluence of the extended pulse are selected so that the material of the first layer is annealed into a ferroelectric state without exceeding the temperature budget of the integrated circuit. Application of the method in heating other articles which comprise a layer to be heated and a temperature sensitive layer is also disclosed. By extending the temporal width of the pulse, energy is supplied at a rate which ensures a more even heating of the first layer without damaging the temperature sensitive layer over time.
Inventors:
Donohiyu, Paul Peter
Todd, Michael Andreyu
Todd, Michael Andreyu
Application Number:
JP2000604446A
Publication Date:
April 04, 2012
Filing Date:
March 03, 2000
Export Citation:
Assignee:
Kinetic Limited
International Classes:
G01J1/02; H01L21/268; B23K26/00; G01J5/02; G01J5/34; H01L21/316; H01L21/8246; H01L27/105; H01L27/14; H01L31/18; H01L37/00; H01L37/02; H01L41/22; H01L41/43; B23K101/40
Domestic Patent References:
| JPS5492283A | 1979-07-21 |
Foreign References:
| US5310990A | 1994-05-10 |
Attorney, Agent or Firm:
Yoshio Kawaguchi
Makoto Ono
Mitsuru Inoue
Akio Ichiiri
Katsuma Osaki
Takamasa Soma
Makoto Ono
Mitsuru Inoue
Akio Ichiiri
Katsuma Osaki
Takamasa Soma