Title:
ANODE HOLDER AND PLATING APPARATUS
Document Type and Number:
Japanese Patent JP2020180357
Kind Code:
A
Abstract:
To provide an anode holder that can operate a valve without using any linkage mechanism.SOLUTION: An anode holder comprises: an internal space formed in the inside of the anode holder for housing an anode; a diaphragm configured so as to cover a front surface of the internal space; a hole formed on an external surface of the anode holder for communicating into the internal space; a valve arranged on a first end side of the anode holder for sealing the hole from the outside of the anode holder; and a first rod arranged in the inside of the anode holder so that the one end protrudes to the outside from the second end side opposite to the first end side of the anode holder. The first rod is configured so as to be movable in the axial direction. The valve is configured so as to move in the same direction as the first rod moves when the first rod moves in the axial direction.SELECTED DRAWING: Figure 8
Inventors:
YAHAGI MITSUTOSHI
KIMURA MASAAKI
IKEDA HIRONARI
KIMURA MASAAKI
IKEDA HIRONARI
Application Number:
JP2019085593A
Publication Date:
November 05, 2020
Filing Date:
April 26, 2019
Export Citation:
Assignee:
EBARA CORP
International Classes:
C25D17/00; C25D17/06; C25D17/12; C25D21/00
Attorney, Agent or Firm:
Shinjiro Ono
Toru Miyamae
Yukio Kanegae
Makoto Watanabe
Toru Miyamae
Yukio Kanegae
Makoto Watanabe