Title:
ANTI-ADHESIVE SHEET AND ADHESIVE SHEET FOR PLASMA ETCHING DEVICE
Document Type and Number:
Japanese Patent JP2020031173
Kind Code:
A
Abstract:
To provide an anti-adhesive sheet which has a smaller amount of degassing and is easily detachable in a plasma etching device.SOLUTION: There is provided an anti-adhesive sheet for a plasma etching device to be attached to the inner wall surface of a vacuum chamber in order to prevent a reactant generated by an etching process from depositing on the inner wall surface of the vacuum chamber of the plasma etching device. The anti-adhesive sheet for the plasma etching device is made of a woven or knitted fabric made of at least aramid fiber. The fabric has at least a thermoplastic resin layer.SELECTED DRAWING: None
Inventors:
OKAZAWA TORU
SAKABE YOHEI
GOTO KAZUKI
SAKABE YOHEI
GOTO KAZUKI
Application Number:
JP2018157149A
Publication Date:
February 27, 2020
Filing Date:
August 24, 2018
Export Citation:
Assignee:
TORAY INDUSTRIES
International Classes:
H01L21/3065; H05H1/46