To provide an anti-fouling film of excellent film hardness and anti-fouling property and a manufacturing method thereof, to provide a product free from any damages on a plastic film as a base material or any damages on a lower layer thereof if the anti-fouling film is a highest layer, and to provide a method for prolonging the continuous operational time of a manufacturing apparatus thereof.

This film is manufactured by using a chemical vapor deposition (CVD) method for silane compound under the atmosphere containing gaseous hydrogen with the silane compound having both a hydrolytic group and an alkyl group for raw materials. The ratio of silicon, oxygen, and carbon in the anti-fouling film is Si : O : C = 1 : (1.0-1.9) : (0.2-2.0).