Title:
反射防止膜及び露光方法
Document Type and Number:
Japanese Patent JP4715540
Kind Code:
B2
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Inventors:
Nobuyuki Matsuzawa
Tunna Kart Buntarica
Ken Ozawa
Kurobe Toshihiro
Yoko Watanabe
Tunna Kart Buntarica
Ken Ozawa
Kurobe Toshihiro
Yoko Watanabe
Application Number:
JP2006038802A
Publication Date:
July 06, 2011
Filing Date:
February 16, 2006
Export Citation:
Assignee:
ソニー株式会社
International Classes:
H01L21/027; G03F7/11; G03F7/20; H01L21/768; H01L23/522
Domestic Patent References:
| JP2005142339A | ||||
| JP2005136244A | ||||
| JP2004031892A | ||||
| JP2002214793A | ||||
| JP2002124518A | ||||
| JP2000195791A |
Attorney, Agent or Firm:
Takahisa Yamamoto