Title:
改善されたスピンボウル適合性を有する反射防止コーティング組成物
Document Type and Number:
Japanese Patent JP4220248
Kind Code:
B2
Abstract:
Anti-reflective compositions and methods of using those compositions to form circuits are provided. The compositions comprise a polymer dissolved or dispersed in a solvent system. In one embodiment, the compositions comprise less than about 0.3% by weight of a strong acid. In another embodiment, the weight ratio of strong acid to weak acid in the composition is from about 0:100 to about 25:75. Examples of preferred weak acid compounds include phenolic compounds (e.g., Bisphenol S, Bisphenol A, alpha-cyano-4-hydroxycinnamic acid), carboxylic acids (e.g., acetic acid), phosphoric acid, and cyano compounds. The polymer and other ingredients are preferably physically mixed in a solvent system. The resulting compositions are spin bowl compatible (i.e., they do not crosslink prior to the bake stages of the microlithographic processes or during storage at room temperature).
Inventors:
Xiao Xie
Meadle Jim Dee.
Buhave mandal
Krishna Mercy Bandana
Nowak Kelly A.
Fowler Michelle
Despandes Shree Ram Vi.
Meadle Jim Dee.
Buhave mandal
Krishna Mercy Bandana
Nowak Kelly A.
Fowler Michelle
Despandes Shree Ram Vi.
Application Number:
JP2002581193A
Publication Date:
February 04, 2009
Filing Date:
April 15, 2002
Export Citation:
Assignee:
Brewer Science INC.
International Classes:
G03F7/11; B32B7/02; C08J3/24; C09D5/00; C09D7/12; C09D105/00; C09D133/00; C09D161/20; C09D163/00; C09D167/00; C09D171/00; C09D179/08; C09D201/00; G03F7/004; G03F7/09; G03F7/40; H01L21/027
Domestic Patent References:
| JP2000187331A | ||||
| JP10270318A | ||||
| JP6118631A | ||||
| JP62174737A | ||||
| JP2001092122A |
Attorney, Agent or Firm:
Nozomi Watanabe
Haruko Sanwa
Haruko Sanwa