Title:
反射防止膜、光学素子および光学系
Document Type and Number:
Japanese Patent JP6882498
Kind Code:
B2
Abstract:
An antireflection film is provided on a substrate and includes an interlayer, a silver-containing metal layer containing silver, and a dielectric layer, which are laminated in this order on a side of a substrate, in which the interlayer is a multilayer film having at least two layers in which a layer of high refractive index having a relatively high refractive index and a layer of lower refractive index having a relatively low refractive index are alternately laminated, the dielectric layer has a surface exposed to air, and the dielectric layer is a multilayer film including a silicon-containing oxide layer, a magnesium fluoride layer, and an adhesion layer provided between the silicon-containing oxide layer and the magnesium fluoride layer and configured to increase adhesiveness between the silicon-containing oxide layer and the magnesium fluoride layer.
Inventors:
Seigo Nakamura
Yoshihiro Tatsuya
Kenichi Umeda
Yuichiro Itai
Yoshihiro Tatsuya
Kenichi Umeda
Yuichiro Itai
Application Number:
JP2019543483A
Publication Date:
June 02, 2021
Filing Date:
August 17, 2018
Export Citation:
Assignee:
FUJIFILM Corporation
International Classes:
G02B1/115; B32B7/023; G02B1/14
Domestic Patent References:
| JP5002101A | ||||
| JP5085778A | ||||
| JP60154201A | ||||
| JP2013195456A | ||||
| JP2007299672A | ||||
| JP2009071146A |
Foreign References:
| WO2017154302A1 | ||||
| WO2016189848A1 |
Attorney, Agent or Firm:
Patent Service Corporation Taiyo International Patent Office