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Patent Searching and Data


Title:
ANTICORROSIVE FOR COPPER AND METHOD FOR PREVENTING CORROSION
Document Type and Number:
Japanese Patent JP2002105672
Kind Code:
A
Abstract:

To provide an anticorrosive exerting excellent anticorrosive effect even in a system in which substance having strong oxidizing power such as hydrogen peroxide is coexistent, especially, to provide an anticorrosive by which copper corrosion in the case an LSI board or a printed circuit board with copper wiring applied is treated in the coexistence of hydrogen peroxide or the like and in a CMP stage for a copper wiring semiconductor substrate can effectively be prevented and to provide a method for preventing copper corrosion using the anticorrosive.

This anticorrosive for copper contains an epihalohydrin-modified polyamide or contains the epihalohydrin-modified polyamide and a benzotriazole compound, and the method for preventing corrosion uses the anticorrosive.


Inventors:
MOTAI TOYOKI
KONDO SEIICHI
Application Number:
JP2000300920A
Publication Date:
April 10, 2002
Filing Date:
September 29, 2000
Export Citation:
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Assignee:
WAKO PURE CHEM IND LTD
MEC KK
International Classes:
C08G69/48; C08K5/3475; C08L77/06; C23F1/14; (IPC1-7): C23F1/14; C08G69/48; C08K5/3475; C08L77/06
Attorney, Agent or Firm:
Yamato Tsutsui