Title:
反射防止膜、反射防止膜を含む積層体、および反射防止膜の製造方法
Document Type and Number:
Japanese Patent JP4506918
Kind Code:
B2
Inventors:
Ayako Shimada
Koji Shiho
Yuichi Hashiguchi
Nishikawa Akira
Koji Shiho
Yuichi Hashiguchi
Nishikawa Akira
Application Number:
JP2000202776A
Publication Date:
July 21, 2010
Filing Date:
July 04, 2000
Export Citation:
Assignee:
JSR CORPORATION
International Classes:
G02B1/11; B32B27/00; C09D127/12; C09D129/10; C09D143/04; C09D183/00; G02B1/111; G02B1/14; G02B1/18
Domestic Patent References:
| JP2000066004A | ||||
| JP2000047004A | ||||
| JP11258403A | ||||
| JP11242101A | ||||
| JP2000171604A | ||||
| JP11052103A | ||||
| JP11172200A |
Attorney, Agent or Firm:
Shigetaka Shirai