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Title:
APPARATUS FOR AUTOMATIC ADJUSTING OF ANGLE OF CRYSTAL IN SLICING MACHINE
Document Type and Number:
Japanese Patent JPH0788837
Kind Code:
A
Abstract:

PURPOSE: To shorten the setting time when a semiconductor ingot is mounted by a method wherein a memory chip is provided on the semiconductor ingot to store the measured value of the angle of a crystal axis and when the semiconductor ingot is sliced, the stored data is red out and the supporting angle of the ingot is automatically calculated.

CONSTITUTION: A semiconductor ingot 20 is fixed on a work holding member 18 and grinding for figuring is performed by means of a cutter blade 25. Then, this ingot 20 is transferred in a crystal measuring device 26 to measure the angle of the crystal axis and the data is stored in a memory chip 21 embedded in an ingot holder 19. When mounting on the work holding member 18 is performed again through the ingot holder 19, the stored data is red out and is transferred to a control apparatus. The control apparatus controls a motor based on the input data and rotates and swings up and down respectively a rotating stage and a swingable stage 10 and automatically adjusts them so as to set the crystal of the ingot 20 at a required angle and slices it by fixing the rotating stage 5 and the swingable stage 10.


Inventors:
YAMAZAKI JUNICHI
Application Number:
JP23772393A
Publication Date:
April 04, 1995
Filing Date:
September 24, 1993
Export Citation:
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Assignee:
KOMATSU MFG CO LTD
International Classes:
B28D5/02; B23D59/00; H01L21/304; (IPC1-7): B28D5/02; H01L21/304
Attorney, Agent or Firm:
Masaaki Yonehara (2 others)



 
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