PURPOSE: To provide an automatic apparatus for adjusting the axis of a laser beam accurately and quickly by using patterning means, imaging means, processing means, and drive means.

CONSTITUTION: An apparatus for automatic adjustment of a laser beam axis includes means for forming a laser CVD pattern on the surface of an object 1, means 5 for imaging the pattern, processing means 6 for calculating the deviation the pattern profile from a laser axis according to the image signal from the imaging means, drive means 7, 3 and 4 for moving a mirror 2 in x-y directions according to the output from the means 6 to adjust the axis of the laser beam to be emitted onto the object 1. For example, the imaging means 5 is arranged above the object to pick up the image of the object irradiated with laser. The imaging means is connected to the image processing means 6, which in turn is connected with the motor drive control 7 to drive motors 3 and 4 in response to the output from the means 6.