Title:
APPARATUS FOR DETECTING AND CONTROLLING CANTILEVER
Document Type and Number:
Japanese Patent JP2005308756
Kind Code:
A
Abstract:
To provide a method for simplifying a constitution and appropriately detecting a cantilever, and to provide its detecting apparatus.
In a scanning probe microscope, a heterodyne laser Doppler meter is used for detecting and controlling the vibration of the cantilever.
Inventors:
KAWAKATSU HIDEKI
Application Number:
JP2005153339A
Publication Date:
November 04, 2005
Filing Date:
May 26, 2005
Export Citation:
Assignee:
JAPAN SCIENCE & TECH AGENCY
International Classes:
G01G3/16; G01B11/00; G01Q10/04; G01Q10/06; G01Q20/02; G01Q30/02; G01Q60/24; G01Q60/32; G01Q60/38; G01Q70/06; (IPC1-7): G01N13/10; G01B11/00
Attorney, Agent or Firm:
Mamoru Shimizu