APPARATUS FOR DETECTING DISPLACEMENT OF BLADE OF SLICER

Title:

APPARATUS FOR DETECTING DISPLACEMENT OF BLADE OF SLICER

Document Type and Number:

Japanese Patent JPH06335917

Kind Code:

A

Abstract:

PURPOSE: To accurately detect a displacement of a blade even when an ingot with a small electric resistance is cut.

CONSTITUTION: The first sensor 5a detecting displacement of a blade 1 in the axial direction from magnetic charge with distance of a water part 4 and the second sensor 5b detecting only the magnetic charge with distance of the wafer part 4 are arranged to be face to each other in the vicinity of the inner diameter blade of the blade 1 through the wafer part 4. An operator 9 wherein displacement of the blade 1 is operated by offsetting the magnetic charge of the wafer part 4 in the magnetic charge detected by the first sensor 5a by the magnetic charge detected by the second sensor 5b, and the magnetic charge of the blade 1 is obtd., is provided.

Inventors:

KAWAGUCHI KEIJI
HAMAZAKI TATSUMI
TADERA YOSHIHIRO

Application Number:

JP12576993A

Publication Date:

December 06, 1994

Filing Date:

May 27, 1993

Export Citation:

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Assignee:

TOYO A TEC KK

International Classes:

B24B27/06; B23D59/00; B28D5/02; H01L21/304; (IPC1-7): B28D5/02; B24B27/06; B28D1/22; H01L21/304

Attorney, Agent or Firm:

Aoyama Ryo (2 outside people)

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