Title:
APPARATUS FOR DIRECT MEASUREMENT OF SUBSTRATE TEMPERATURES
Document Type and Number:
Japanese Patent JPS5226882
Kind Code:
A
Abstract:
PURPOSE: An apparatus capable of making direct measurement of substrate temperatures while removing adverse influence by high frequency voltage induction, in ion plating or spattering apparatus.
Inventors:
YAMAGUCHI HISAO
Application Number:
JP10255475A
Publication Date:
February 28, 1977
Filing Date:
August 26, 1975
Export Citation:
Assignee:
ULVAC CORP
International Classes:
C23C14/54; C23C14/32; G01K7/02; (IPC1-7): G01K7/02