Login| Sign Up| Help| Contact|

Patent Searching and Data


Title:
APPARATUS FOR DRYING SUBSTRATE
Document Type and Number:
Japanese Patent JP2012148237
Kind Code:
A
Abstract:

To attain space saving, power saving and a low price more than before.

An apparatus A for washing and drying a substrate is equipped with a drying tank 6 which has an opening 6a at an upper part and which accommodates and discharges a printed substrate P in a vertical posture through the opening 6a, a compressed air jetting nozzle 7 which jets compressed air from its both surfaces to the printed substrate P in the drying tank 6, a compressor 8 for producing compressed air, a branch part 10 which introduces compressed air introduced from the compressor 8 to the compressed air jetting nozzle 7, a shut-off valve 9 for opening/closing a junction between the compressor 8 and the branch part 10 at a latter stage, a heater 11 which heats the printed substrate P in the drying tank 6 from both surfaces, a power source 12 for supplying electric power to the heater 11 and a controlling part 13 for controlling the compressor 8, the shut-off valve 9, the heater 11 and the power source 12. The compressed air jetting nozzle 7 is provided before the heater 11 in an advancing direction of the printed substrate P into the drying tank 6.


Inventors:
ASAMIYA MASANORI
Application Number:
JP2011008704A
Publication Date:
August 09, 2012
Filing Date:
January 19, 2011
Export Citation:
Click for automatic bibliography generation   Help
Assignee:
YOKOGAWA DENSHIKIKI CO LTD
International Classes:
B08B3/02; F26B15/12
Attorney, Agent or Firm:
Masatake Shiga
Tadashi Takahashi
Takashi Watanabe
Suzuki Mitsuyoshi
Kazuya Nishi
Yasuhiko Murayama