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Title:
APPARATUS FOR FORMING COMPOSITE BUILT-UP FILM
Document Type and Number:
Japanese Patent JPS6393375
Kind Code:
A
Abstract:

PURPOSE: To easily achieve the mass production of a precise composite built-up film, by partitioning the surface of the water in a water tank into a plurality of sections by providing a fixed plate to the water surface part of the water tank and using a lifter capable of independently supporting a film forming solid substrate in a gaseous phase and a liquid phase.

CONSTITUTION: A lifter for preparing a composite built-up film is equipped with an upper arm 5 for supporting a solid substrate 10 in a gaseous phase to move left and right as well as up and down and a lower arm 6 for supporting the solid substrate 10 in a liquid phase to move left and right as well as up and down. At first, in such a state that the solid substrate 10 is mounted to the gripper 4 of the upper arm 5, A-molecules are developed on the left water surface 9-1 partitioned of a fixed plate barrier 2 of a water tank 1 and B-molecules are developed on the right water surface 9-2 and monomolecules are arranged by a movable plate barrier 3. Thereafter, the solid substrate 10 is transferred from the upper arm 5 to the lower arm 6 on the side of the left water surface 9-1 and both arms 5, 6 are rotated by 180° around a support jig 7 and, now, the solid substrate 10 is transferred from the lower arm 6 to the upper arm 5 to successively build up monomolecular films A, B when passes the respective water surfaces.


Inventors:
NAKANISHI HACHIRO
OKADA SHUJI
MATSUDA HIROO
KATO MASAO
HARA KATSUHEI
ONO NOBUAKI
Application Number:
JP24025286A
Publication Date:
April 23, 1988
Filing Date:
October 09, 1986
Export Citation:
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Assignee:
AGENCY IND SCIENCE TECHN
SANESU KEISOKU KK
International Classes:
H01B3/00; B05C3/02; B05D1/20; H01L51/05; H01L51/40; (IPC1-7): B05C3/02; B05D1/20; H01B3/00; H01L29/28
Domestic Patent References:
JPS59183861A1984-10-19
JPS62274732A1987-11-28
Attorney, Agent or Firm:
Masahide Takesue (2 outside)