Title:
APPARATUS FOR GENERATING PLASMA
Document Type and Number:
Japanese Patent JPS52109451
Kind Code:
A
Inventors:
KOIDE AKIMICHI
Application Number:
JP2562776A
Publication Date:
September 13, 1977
Filing Date:
March 11, 1976
Export Citation:
Assignee:
KOIDE AKIMICHI
International Classes:
H05H1/34; B23K9/00; B23K10/00; H05H1/26; (IPC1-7): B23K9/00; H05H1/26