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Patent Searching and Data


Title:
APPARATUS FOR HEAT TREATMENT BY LAMP
Document Type and Number:
Japanese Patent JPS6386512
Kind Code:
A
Abstract:

PURPOSE: To realize lamp heat treatment which equally heats a sample by sequentially and concentrically arranging holder for holding sample and a reflector and allowing the holder to make revolution for the lamp.

CONSTITUTION: A longitudinal lamp 2 such as halogen lamp is arranged at the center of a treatment chamber 1. A cylindrical reflector 5 and holder 7 are respectively provided at the inside of treatment chamber 1 in concentrical with the lamp 2 and another reflector 9 is also provided to the upper part of a rotating plate 8. When a motor 11 is driven to rotate at a high speed the holeder 7 holding a sample through a rotating shaft 10 and the rotating plate 8 and the lamp 2 is lit, optical energy of lamp 2 directly irradiates the surface of sample 3 and indirectly irradiates the sample through the reflectors 5, 9. Since the reflector 5 and holder 7 are concentrically arranged around the lamp 2, the sample 3 is equally irradiated with the optical energy. Since the sample 3 is rotated by the motor 11, the sample 3 may be heated very much equally.


Inventors:
MISAWA HISATOKU
Application Number:
JP23231386A
Publication Date:
April 16, 1988
Filing Date:
September 30, 1986
Export Citation:
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Assignee:
TOSHIBA CORP
International Classes:
H01L21/26; H01L21/268; (IPC1-7): H01L21/26
Attorney, Agent or Firm:
Kazuo Sato