PURPOSE: To make it possible to uniformly heat a specimen, by a method wherein a heat transfer plate is formed of a sapphire plate and a thin film heater comprising tungsten or the like is formed on the rear surface of the sapphire plate.
CONSTITUTION: A thin film heater 2 is deposited and formed on the whole rear surface of a heat transfer member 1 comprising a monocrystalline sapphire plate with a thickness of about 1mm. The thin film heater 2 is formed, for example, by vapor depositing tungsten under high vacuum of 10-5Torr or less. A pair of rod shaped electrodes 3a, 3b are parallelly arranged to the periphery of the rear surface part of the thin film heater 2 to be attached to said thin film heater 2. By applying a voltage between the electrodes 3a, 3b, a current is supplied to the thin film heater 2 to heat the same.
WATANABE MASAHARU
INOUE TOMOYASU
TAKAHASHI SHIYOUICHI
TOSHIBA CERAMICS CO