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Title:
APPARATUS FOR HEATING SPECIMEN IN VACUUM
Document Type and Number:
Japanese Patent JPS5939348
Kind Code:
A
Abstract:

PURPOSE: To make it possible to uniformly heat a specimen, by a method wherein a heat transfer plate is formed of a sapphire plate and a thin film heater comprising tungsten or the like is formed on the rear surface of the sapphire plate.

CONSTITUTION: A thin film heater 2 is deposited and formed on the whole rear surface of a heat transfer member 1 comprising a monocrystalline sapphire plate with a thickness of about 1mm. The thin film heater 2 is formed, for example, by vapor depositing tungsten under high vacuum of 10-5Torr or less. A pair of rod shaped electrodes 3a, 3b are parallelly arranged to the periphery of the rear surface part of the thin film heater 2 to be attached to said thin film heater 2. By applying a voltage between the electrodes 3a, 3b, a current is supplied to the thin film heater 2 to heat the same.


Inventors:
MIKATA HIROICHI
WATANABE MASAHARU
INOUE TOMOYASU
TAKAHASHI SHIYOUICHI
Application Number:
JP14877382A
Publication Date:
March 03, 1984
Filing Date:
August 27, 1982
Export Citation:
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Assignee:
TOKYO SHIBAURA ELECTRIC CO
TOSHIBA CERAMICS CO
International Classes:
H05B3/20; B01L7/00; G01N25/00; (IPC1-7): B01L7/00; G01N25/00; H05B3/20
Attorney, Agent or Firm:
Takehiko Suzue



 
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