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Patent Searching and Data


Title:
APPARATUS FOR HIGH PRECISION HUMIDITY, FLOW RATE CONTROL, AND MIXING AND DILUTING OF GAS
Document Type and Number:
Japanese Patent JP2011062679
Kind Code:
A
Abstract:

To supply a gas coping with every testing condition, by adjusting the gas to a stable humidity and adjusting the flow rate to a constant state and enlarging a conditional range of dilution and mixed gas formation before discharging gas of unfavorable conditions with an unstable and narrow conditional range injected to a union of a code 20 by a union of a code 21, converting to a stable gas.

The pressure of the gas is kept constant by controllers of codes 5, 6; the gas is injected into water storing cylinders of codes 1, 2, or into drying cylinders of codes 7, 8; the humidity is adjusted; and the gas is mixed by selector valves of codes 15, 16 to form the diluted gas, which is adjusted by a flow meter of a manufacturing code 19 and discharged.


Inventors:
KOBAYASHI SHINPEI
Application Number:
JP2009237724A
Publication Date:
March 31, 2011
Filing Date:
September 17, 2009
Export Citation:
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Assignee:
HOSEN TECHNO KK
International Classes:
B01J4/02; B01D53/26; B01F23/10; G01N1/28