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Patent Searching and Data


Title:
APPARATUS FOR HOLDING THIN-BOARD SHAPED MATERIAL AND METHOD FOR HOLDING THIN-BOARD SHAPED MATERIAL
Document Type and Number:
Japanese Patent JP2013006222
Kind Code:
A
Abstract:

To provide a holding apparatus which suppresses the generation and scattering of dust caused by friction, with which conventional transfer hands can be easily replaced at low cost, and which is thin and light in weight and capable of accessing even a narrow area.

The holding apparatus 22 includes: a flow channel 36 for circulating compressed gases therein; a transfer finger 23 having jetting ports 30 from which the compressed gases are jetted; a first holding member 26 fixed to the tip of the transfer finger 23; and a second holding member 29 operated by a drive means 28. A circumferential edge of the thin-board shaped material floated by jet forces of the compressed gases is held by the first holding member 26 and the second holding member 29 while being corrected in positional displacement.


Inventors:
SAKATA KATSUNORI
HAYAMIZU SHIN
Application Number:
JP2009237079A
Publication Date:
January 10, 2013
Filing Date:
October 14, 2009
Export Citation:
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Assignee:
RORZE CORP
International Classes:
B25J15/08; B65G49/07; H01L21/677