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Title:
APPARATUS FOR INSPECTING SURFACE OF SUPPORT
Document Type and Number:
Japanese Patent JPH09243572
Kind Code:
A
Abstract:

To prevent the erroneous detection of the flaw of a film over the entire width of the film by correcting the level change of a photomultiplier tube output signal caused by the change of the quantity of laser beam emitted from a laser irradiation apparatus.

The laser beam incident on a photomultiplier tube 5 is photoelectrically converted by the tube 5 to become an output signal which is, in turn, outputted to a first amplifier circuit 6 to be amplified up to a specific level to be outputted to a first integration circuit 7 and an automatic grain control circuit 10. A high voltage generation circuit 9 applies high voltage controlled by the difference voltage inputted from a first comparison circuit 8 to the photomultiplier tube 5 to control the sensitivity of the tube 5. The signal output of the circuit 16 is inputted to a second amplifier circuit 12 through a level shift circuit 11 to be outputted to a determination circuit 18. Further, the signal output of the circuit 12 of which the gain can be controlled by a control signal is inputted to a second integration circuit 14 through an absolute value circuit 13 to be integrated.


Inventors:
WATANUKI AKIO
ISHIMOTO KIYOSHI
Application Number:
JP5438396A
Publication Date:
September 19, 1997
Filing Date:
March 12, 1996
Export Citation:
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Assignee:
HITACHI ELECTRONICS
KONISHIROKU PHOTO IND
International Classes:
G01N21/89; G01N21/892; (IPC1-7): G01N21/89
Attorney, Agent or Firm:
Akio Takahashi (1 person outside)