To provide an apparatus for machining fine recessed parts and a method for machining fine recessed parts by which both the load applied to a workpiece and the displacement of a working tool are controllable by measuring and calculating the load loaded on the workpiece and the displacement of the working tool, thereby suppressing the fluctuation in the shape of the fine recessed parts by the change in the behavior of plastic deformation due to the material of the workpiece and the difference of the shape of the working tool at a small value.
This apparatus is provided with: a crosshead 4 on which a working tool 3 having fine protrusions 3a in the tip part is mounted attachably and detachably; a servomotor 5 and ball screws 6 as a pressing mechanism by which the working tool 3 is made possible to be pressed against the surface Wa of the workpiece W by moving the crosshead 4 in the vertical direction; and a calculating and controlling part 7 for controlling the movement of the crosshead 4. A load sensor 8 for measuring the load to be loaded on the working tool 3 and outputting the load to the calculating and controlling part 7 and a displacement sensor 9 for measuring the displacement of the working tool 3 and the workpiece W and outputting to the calculating and controlling part 7 are installed.
UEHARA YOSHITAKA
OTA MINORU
TAKASHIMA KAZUHIKO
UNIV NIIGATA
| JP2006150440A | 2006-06-15 | |||
| JP2004098125A | 2004-04-02 | |||
| JPH081387A | 1996-01-09 | |||
| JP2006167743A | 2006-06-29 |