To provide an apparatus and method of manufacturing a color filter, by which generation of defects in a film plane or a film thickness profile of a color layer can be suppressed to improve the yield when heat-drying is carried out in a reduced pressure environment.
The manufacturing apparatus 1 for a color filter includes a reduced pressure heating device 8. The reduced pressure heating device 8 includes a pressure reducing section 9 and a heating section 10. The manufacturing apparatus 1 for a color filter heats a substrate 3 in a reduced pressure environment to vaporize a solvent component (water content, a solvent component and a binder) included in a color layer of the substrate 3. By heating and drying in a reduced pressure environment, the drying time can be reduced and a color layer with uniform film thickness can be obtained. By carrying out pressure reduction and heating under predetermined pressure reduction conditions (such as a reduced pressure value and retention time of the reduced pressure) and predetermined temperature conditions (such as a substrate temperature, heating temperature and heating time), generation of defects and abnormal film thickness in a color layer can be suppressed to improve the yield.
TAZAKI TAKAYUKI
IZUHARA TOMOYUKI
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