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Title:
APPARATUS FOR MANUFACTURING COLOR FILTER, METHOD OF MANUFACTURING COLOR FILTER, REDUCED PRESSURE HEATING DEVICE, REDUCED PRESSURE HEATING METHOD, APPARATUS FOR MANUFACTURING DISPLAY DEVICE AND METHOD MANUFACTURING OF DISPLAY DEVICE
Document Type and Number:
Japanese Patent JP2009086387
Kind Code:
A
Abstract:

To provide an apparatus and method of manufacturing a color filter, by which generation of defects in a film plane or a film thickness profile of a color layer can be suppressed to improve the yield when heat-drying is carried out in a reduced pressure environment.

The manufacturing apparatus 1 for a color filter includes a reduced pressure heating device 8. The reduced pressure heating device 8 includes a pressure reducing section 9 and a heating section 10. The manufacturing apparatus 1 for a color filter heats a substrate 3 in a reduced pressure environment to vaporize a solvent component (water content, a solvent component and a binder) included in a color layer of the substrate 3. By heating and drying in a reduced pressure environment, the drying time can be reduced and a color layer with uniform film thickness can be obtained. By carrying out pressure reduction and heating under predetermined pressure reduction conditions (such as a reduced pressure value and retention time of the reduced pressure) and predetermined temperature conditions (such as a substrate temperature, heating temperature and heating time), generation of defects and abnormal film thickness in a color layer can be suppressed to improve the yield.


Inventors:
YOSHIDA TATSUYA
TAZAKI TAKAYUKI
IZUHARA TOMOYUKI
Application Number:
JP2007256946A
Publication Date:
April 23, 2009
Filing Date:
September 29, 2007
Export Citation:
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Assignee:
DAINIPPON PRINTING CO LTD
International Classes:
G02B5/20; B05C9/14; B05D3/12; G02F1/1335
Domestic Patent References:
JPH10325903A1998-12-08
JP2002182028A2002-06-26
JP2007010885A2007-01-18
JP2006205078A2006-08-10
Attorney, Agent or Firm:
Seiichi Inoue