Title:
APPARATUS FOR MEASURING FILM SPECTRAL PROPERTY
Document Type and Number:
Japanese Patent JP2006189453
Kind Code:
A
Abstract:
To measure film properties for providing a photocell where sensitivity is increased in the blue and UV spectral region.
This apparatus for measuring film spectral property comprises a means for supplying monochromatic light; a means for chopping the monochromatic light; a means for converging the monochromatic light on a sample which is a substrate having the film to be analyzed on its surface; a means for coupling the sample to a first photodetector on the film side through immersion oil and converging the light radiated by the sample on the second photodetector; and a means for analyzing the signals from the first photodetector and the second photodetector and obtaining a desired film spectrum property.
Inventors:
FORREST STEPHEN R
BURROWS PAUL E
GARBUZOV DMITRI Z
BULOVIC VLADIMIR
BURROWS PAUL E
GARBUZOV DMITRI Z
BULOVIC VLADIMIR
Application Number:
JP2006029590A
Publication Date:
July 20, 2006
Filing Date:
February 07, 2006
Export Citation:
Assignee:
UNIV PRINCETON
International Classes:
G01N21/33; C09K11/06; G01J1/58; G02B1/11; H01L31/04; H01L31/052
Attorney, Agent or Firm:
Hideto Asamura
Hajime Asamura
Sadafumi Kobori
Yukihiro Ikeda
Hajime Asamura
Sadafumi Kobori
Yukihiro Ikeda
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