Title:
APPARATUS FOR MEASURING FINE PERIODIC VIBRATION DISPLACEMENT
Document Type and Number:
Japanese Patent JP3150239
Kind Code:
B2
Abstract:
PURPOSE: To provide a displacement measuring apparatus which enables a surface displacement of a subject to be measured simultaneously and easily in a wide range and moreover, the detection of a phase in addition to the intensity of amplitude.
CONSTITUTION: A periodic electrical signal is given to a piezo-electric body 12 by an oscillator 17 to optically measure a displacement of a surface caused by mechanical vibration excited by the signal. A semiconductor laser light source 11 is made to emit light instantaneously by a pulse generator 18 synchronizing an electrical signal inputted into the piezo-electric body 12 to fetch the surface displacement into an image input means 14 as still picture data. The numeral 19 indicates a frame memory and 20 an image display means. The numeral 16 indicates a lens, 15 a beam splitter and 13 a control surface to form a Michelson type interferometer. The numeral 131 indicates a drive means to move the control surface by which a fringe scanning can be performed.
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Inventors:
Tadashi Eguchi
Shigeru Okuma
Shigeru Okuma
Application Number:
JP23730293A
Publication Date:
March 26, 2001
Filing Date:
August 31, 1993
Export Citation:
Assignee:
Canon Inc
International Classes:
G01H9/00; G01H11/08; (IPC1-7): G01H9/00; G01H11/08
Domestic Patent References:
| JP6263802A | ||||
| JP3627859Y1 |
Attorney, Agent or Firm:
Johei Yamashita