Title:
APPARATUS FOR MEASURING GAS FLOW PARTS
Document Type and Number:
Japanese Patent JPS5231770
Kind Code:
A
Abstract:
PURPOSE: To make sequential exhaust of the gas flowing in plural lines through the same valve by means of the same pump thereby making accurate measurement of gases containing impure reactants or gases that are difficult to measure the flow rate directly.
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Inventors:
AKIBA MASAKUNI
Application Number:
JP10696475A
Publication Date:
March 10, 1977
Filing Date:
September 05, 1975
Export Citation:
Assignee:
HITACHI LTD
International Classes:
G01F15/00; G01F1/22; (IPC1-7): G01F15/00