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Title:
APPARATUS FOR MEASURING SHAPE OF FACE
Document Type and Number:
Japanese Patent JP2000275021
Kind Code:
A
Abstract:

To obtain a face shape-measuring apparatus which can highly accurately measure a face shape with the use of a phase shift method even when the face vibrates or the like when the face is measured.

A reflecting light from an area 5a of a reference face of a Fizeau plane member 5 and a reflecting light from a face 6 to be measured are made to interfere, and a phase distribution is measured. A face shape of the face 6 to be measured is measured with the use of a phase shift interference method. In this case, a reflecting light from an area 5b and a reflecting light from a reflecting plane member 8 as a standard face are made to interfere and, a phase distribution is measured at the same time. A phase measurement error is obtained from the latter phase distribution, based on which the former phase distribution is corrected. Since the measured value is corrected on the basis of the error calculated when the standard face is simultaneously measured, even an effect of errors due to vibrations or the like can be eliminated, and the face shape can be correctly measured.


Inventors:
NAKAYAMA SHIGERU
Application Number:
JP8227499A
Publication Date:
October 06, 2000
Filing Date:
March 25, 1999
Export Citation:
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Assignee:
NIKON CORP
International Classes:
G01B9/02; G01B11/24; (IPC1-7): G01B11/24; G01B9/02
Attorney, Agent or Firm:
Toshiaki Hosoe