Title:
APPARATUS FOR MEASURING SUPERRHIGH VACUUM PRESSURE SENSOR
Document Type and Number:
Japanese Patent JPS5339173
Kind Code:
A
Inventors:
KANEMOCHI TOORU
NAGATA SABUROU
NAGATA SABUROU
Application Number:
JP11388276A
Publication Date:
April 10, 1978
Filing Date:
September 21, 1976
Export Citation:
Assignee:
NAGATA SABUROU
International Classes:
G01L21/32; H01J41/02; (IPC1-7): G01L21/32; H01J41/02