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Title:
APPARATUS AND METHOD FOR CHOOSING EMISSION REGION OF EMISSION PATTERN
Document Type and Number:
Japanese Patent JP2007073520
Kind Code:
A
Abstract:

To provide an electrically-charged particle apparatus and its method using the electrically-charged particle emitter with a discontinuous emission pattern.

The electrically-charged particle apparatus includes an emitter (102) having an emission pattern containing at least two emission peaks, gun lenses (119, 519 and 919), and a diaphragm (120). The gun lens contains a deflector unit (110) which directs one emission peak of at least two emission peaks towards an opening area of the diaphragm, thereby selecting one emission peak from at least two emission patterns.


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Inventors:
ZHOU FAN
FROSIEN JUERGEN
Application Number:
JP2006239981A
Publication Date:
March 22, 2007
Filing Date:
September 05, 2006
Export Citation:
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Assignee:
INTEGRATED CIRCUIT TESTING
International Classes:
H01J37/04; H01J37/065; H01J37/073; H01J37/147
Domestic Patent References:
JP2005116743A2005-04-28
JPH11265071A1999-09-28
JP2005026026A2005-01-27
JP2005032508A2005-02-03
JPH03146951A1991-06-21
JP2005197336A2005-07-21
JP2002279921A2002-09-27
Foreign References:
WO2004055856A22004-07-01
Attorney, Agent or Firm:
Sadao Kumakura
Fumiaki Otsuka
Takaki Nishijima
Hiroyuki Suda



 
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