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Title:
APPARATUS AND METHOD FOR COATING FINE PARTICLES
Document Type and Number:
Japanese Patent JP2011005379
Kind Code:
A
Abstract:

To provide an apparatus of a simpler structure and a method for coating fine particles, capable of causing fine particles to hit an object to be coated therewith at a higher speed and of coating the object therewith in a shorter time, without using a high pressure gas.

The apparatus for coating fine particles includes a vacuum chamber 10, a first DC power source 20, a wire-shaped linear electrode 30, a cylindrical electrode 31 including a slit 31S formed thereon of a width greater than the diameter of fine particles NR, wherein the fine particles are stored or supplied. The linear electrode 30 and the cylindrical electrode 31 are disposed in the chamber 10 in such a manner that the linear electrode 30 is disposed over the position of the axis of the cylindrical electrode 31 without touching each other. An object W to be coated with fine particles is disposed in the chamber 10 on a position facing the slit 31S. The first DC power source 20 generates a first potential difference between the linear electrode 30 and the cylindrical electrode 31 so that the fine particles present in the cylindrical electrode 31 are ejected through the slit 31S to hit the object W to be coated therewith.


Inventors:
SHOJI TATSUO
SHIRAIWA SHINICHIRO
Application Number:
JP2009149379A
Publication Date:
January 13, 2011
Filing Date:
June 24, 2009
Export Citation:
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Assignee:
SHOJI TATSUO
NORITAKE HITOMI
International Classes:
B05B5/025; B05B5/057; B05B5/08; B05D1/26; B05D3/12; B05D7/24; C23C24/04
Domestic Patent References:
JP2008137122A2008-06-19
JP2008038186A2008-02-21
JP2001247979A2001-09-14
JPS6041571A1985-03-05
Attorney, Agent or Firm:
Okada International Patent Office