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Title:
APPARATUS AND METHOD FOR CONTINUOUSLY CASTING SILICON INGOT
Document Type and Number:
Japanese Patent JP2012041197
Kind Code:
A
Abstract:

To provide an apparatus and a method for continuously casting a silicon ingot reducible of contamination by metal impurities in a cast ingot and a wafer which is cut out from the ingot.

The apparatus for continuously casting a silicon ingot comprises a cooling crucible 7 for continuously casting by melting silicon raw material, having no bottom and having conductivity, for use when continuously casting a polycrystalline silicon by an electromagnetic casting method; an induction coil 8 surrounding the cooling crucible, and heating the silicon raw material fed in the cooling crucible by electromagnetic induction; and a chamber 1 for housing respective members, wherein a wool material 17 is disposed on the inner wall surface of the chamber 1 and/or at least a part of the surface of the members housed in the chamber 1.


Inventors:
KUSABA TATSUMI
Application Number:
JP2010180768A
Publication Date:
March 01, 2012
Filing Date:
August 12, 2010
Export Citation:
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Assignee:
SUMCO CORP
International Classes:
C01B33/02
Attorney, Agent or Firm:
Michio Mori
Hideyuki Matsunaga