To provide an apparatus for producing negative charge oxygen atoms which can be used at normal pressure and which makes it possible to irradiate a part to be irradiated with the negative charge oxygen atoms having a target energy level.
The apparatus for producing negative charge oxygen atoms is constituted of an oxygen chamber 6 and a forming chamber 7 of normal pressure. The chambers are demarcated by a negative charge oxygen atom generation member 2 formed of a calcium-aluminum double oxide wherein the molar ratio of calcium oxide to aluminum oxide is 12/7. Further, the apparatus is equipped with: a heating means 4 for heating the negative charge oxygen atom generation member 2; a cathode 3 which is arranged at the oxygen chamber side face of the negative charge oxygen atom generation member 2; and an anode 10 which is arranged at the forming chamber side face by leaving an interval from the negative charge oxygen atom generation member 2. In the apparatus, a direct current source E1 is connected to the anode and the cathode, a flow 15 of a rare gas is formed in the irradiation direction of the negative charge oxygen atoms of the forming chamber 7 from the negative charge oxygen atom generation part 9, and an accelerating electrode 12 is arranged for applying voltage between the anode and itself in the irradiation direction of the negative charge oxygen atoms.
Ryukichi Abe
Hirukawa Masanobu
Hiroki Shirai
Norihiko Uchida
Hideo Sugai
Kenji Aoki
Hiroshi Nagisawa
Tsutomu Iitaka
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