Title:
APPARATUS AND METHOD FOR INFORMATION PROCESSING, COMPUTER-READABLE MEMORY, AND PROGRAM
Document Type and Number:
Japanese Patent JP2003133199
Kind Code:
A
Abstract:
To provide a method for making the productivity of a semiconductor manufacturing apparatus improved by diagnosing the performance of an apparatus.
A control command input from a operation terminal 101 is transferred to a control object unit 103 for driving the apparatus. At the same time, the control command is transferred to a unit operation simulation section 113 for executing simulation. The apparatus state of the control object unit 103 and the unit operation simulating section 113 are compared in an actual operation/simulation operation comparison section 121 and diagnosis of the failure is conducted at failure/preventing diagnosis section 123, after subjecting it to statistical processing at a apparatus state trend 122.
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Inventors:
TEZUKA NOBUHIKO
OZAWA KUNITAKA
OZAWA KUNITAKA
Application Number:
JP2001322578A
Publication Date:
May 09, 2003
Filing Date:
October 19, 2001
Export Citation:
Assignee:
CANON KK
International Classes:
G03F7/20; H01L21/027; (IPC1-7): H01L21/027; G03F7/20
Domestic Patent References:
| JPH08161033A | 1996-06-21 | |||
| JPH11186118A | 1999-07-09 | |||
| JP2000269108A | 2000-09-29 | |||
| JPH06104214A | 1994-04-15 | |||
| JPH02177312A | 1990-07-10 | |||
| JP2000082662A | 2000-03-21 |
Attorney, Agent or Firm:
Yasunori Otsuka (3 others)
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