To provide an apparatus and a method for an inspection, in which a transparent material or the like such as a film can be inspected irrespective of the surface of the transparent material, the surface of an object wrapped with the transparent material or the state at the inside of the object wrapped with the transparent material.
In the inspection apparatus, the transparent material or the object 1 wrapped with the transparent material is used as an object to be inspected. The inspection apparatus is provided with an irradiation device 11, with which the object to be inspected is irradiated with a linear parallel luminous flux L1. The inspection apparatus is provided with an imaging element 21a, which detects light from the object to be inspected. The inspection apparatus is provided with an image processor 41, which forms the image of the object 1a to be inspected.
OKAMOTO IKUO
JPS62122928A | 1987-06-04 | |||
JPS63165738A | 1988-07-09 | |||
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JPH1048144A | 1998-02-20 | |||
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JPH0690143B2 | 1994-11-14 | |||
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JPH07209205A | 1995-08-11 |
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