Title:
APPARATUS AND METHOD FOR LASER PROCESSING
Document Type and Number:
Japanese Patent JP3604014
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide an apparatus for laser processing capable of processing at a high speed and in a high quality by keeping high a pulse energy density on a surface of an object to be processed.
SOLUTION: A convergent lens 38 converges an incident laser beam, and introduces the incident laser beam to the object 50 to be processed with the converged laser beam. A plurality of scanners 25, 35 scan the incident laser beam. The beam scanned by the scanners is incident to the object 50 through the lens 38. The scanners receive a control from an external unit and conducts scanning operations for moving the incident positions of the beams to the object 50. A sorting unit 10 introduces the beams to the selected partial scanner of the plurality of the scanners, and changes the scanner of the incident destination according to a time.
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Inventors:
Keiji Iso
Kazumasa Nojima
Kazumasa Nojima
Application Number:
JP2001386307A
Publication Date:
December 22, 2004
Filing Date:
December 19, 2001
Export Citation:
Assignee:
Sumitomo Heavy Industries Ltd.
International Classes:
B23K26/064; B23K26/067; B23K26/082; (IPC1-7): B23K26/08; B23K26/06
Domestic Patent References:
| JP2000263271A | ||||
| JP2000107875A | ||||
| JP8141769A |
Attorney, Agent or Firm:
Keishiro Takahashi
Mikio Kuruyama
Mikio Kuruyama
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