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Patent Searching and Data


Title:
APPARATUS AND METHOD FOR OPTICAL SCANNING MEASUREMENT
Document Type and Number:
Japanese Patent JPH04328439
Kind Code:
A
Abstract:

PURPOSE: To measure the ripples on the mirror surface of a polygon scanner and the deformation of the mirror surface by the rotating centrifugal force.

CONSTITUTION: A laser light source 1 is expanded with a beam expander 2. The laser beam L is cast on a scale 3 having a slit pattern (e). The laser beam emitted from the scale 3 is cast on a slit plate 10 through a first cylindrical lens 4, an Fθ lens 5, a polygon scanner 6, a second cylindrical lens 7 and a condenser lens 8 which are arranged in the reverse pattern from the constitution of a laser printer. The image of the pattern (e) of the scale 3 is focused on the slit plate 10. The pattern of the scale 3 Which is selected with a slit 10a of the slit plate 10 is cast into a photodiode 9. The signal which is affected by the state of a mirror surface 6a of the polygon scanner 6 is obtained from the photodiode 9.


Inventors:
SUGIZAKI IWAO
TASHIRO KATSU
Application Number:
JP12477891A
Publication Date:
November 17, 1992
Filing Date:
April 26, 1991
Export Citation:
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Assignee:
COPAL ELECTRONICS
International Classes:
G01J1/00; G01M11/00; G02B26/10; G02B26/12; (IPC1-7): G01J1/00; G01M11/00; G02B26/10
Attorney, Agent or Firm:
Jiro Tanaka (1 outside)