Title:
APPARATUS AND METHOD FOR PROBE-TYPE MEASUREMENT OF SURFACE ROUGHNESS
Document Type and Number:
Japanese Patent JP3539795
Kind Code:
B2
Abstract:
PURPOSE: To provide a structure in which the value of the average interval Sm between a recessed part and a protruding part on the surface of an object to be measured is measured precisely, in which an adjusting operation is not complicated and whose production costs are not increased.
CONSTITUTION: Before an object to be measured is measured, a reference piece of which the value of the average interval Sm between a recessed part and a protruding part on its surface has been known is placed on a measuring stage (Step 1). The surface of the reference piece is scanned by a detector, and the value Sm1 of the actual Sm is measured (Step 5). Then, on the basis of the actual value Sm1, of a known value Sm2 and of the preset transfer speed v1 of the detector, the actual transfer speed (v) of the detector is computed (Step 6). Then, on the basis of the actual transfer speed (v), a constant time interval T at which the detector performs a detection operation is computed (Step 7). After that, on the basis of the constant time interval T, the measuring operation of the surface roughness of the object to be measured is performed (Step 10).
Inventors:
Nobuyuki Tanaka
Application Number:
JP12211095A
Publication Date:
July 07, 2004
Filing Date:
May 22, 1995
Export Citation:
Assignee:
Kosaka Research Institute, Ltd.
International Classes:
G01B7/34; G01B7/00; G01B21/30; (IPC1-7): G01B21/30
Domestic Patent References:
| JP7019856A | ||||
| JP3042508A |
Attorney, Agent or Firm:
Kinzo Koyama
Takeo Koyama
Takeo Koyama