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Title:
APPARATUS AND METHOD FOR PRODUCING CALCIUM FLUORIDE SINGLE CRYSTAL
Document Type and Number:
Japanese Patent JP2005075689
Kind Code:
A
Abstract:

To provide an apparatus for producing a calcium fluoride single crystal having transmittance not decreased even when subjected to long-term irradiation with a laser beam; and a method for producing the same.

The production apparatus is equipped with a crystal growth furnace capable of forming a temperature gradient, a crucible arranged in the crystal growth furnace, and a mechanism for vibrating the crucible during crystal growth. The crystal growth is performed by using the apparatus while the crucible is under vibration with suitable frequency, displacement amount, and acceleration.


Inventors:
Shiozawa, Masaki
Application Number:
JP2003000308800
Publication Date:
March 24, 2005
Filing Date:
September 01, 2003
Export Citation:
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Assignee:
NIKON CORP
International Classes:
C30B29/12; C30B29/10; (IPC1-7): C30B29/12